If it is processing of carbon ceramic in the semiconductor industry, environmental measures, power factor improvement, the efficiency improvement of working process, new heater development, leave it to Sanko Co., LTD.

Product line-up Graphite Product

 

The graphite products for silicon single crystal raising equipment.
The graphite products for semiconductor fabrication machines and equipment.
Susceptor relations (various coating).
* If it is graphite processed goods, it will take an order from a design to processing by anything.

 

Ceramic Product

General refractory product products (alumina, zirconia, magnesia).
The ceramic products for semiconductor fabrication machines and equipment.
* If it is refractory product processed goods, it will take an order from a design to
processing by anything.

 

Metalworking Product
The design and manufacture of an Assy article and parts which uses materials, such as
a high melting point metal (Mo, Ta, W, Ti) and common metal (SUS, aluminum, Cu).

 

Equipment Products
shinkuro
Heat treatment processing is performed and a quality product is produced.
shinkuro

Production of high quality products by performing the heat-treatment processing of the product of
during the vacuum or a gas atmosphere

VieZA
Realizing power factor 1, Next-generation electricity adjustment unit
VieZA

Electricity adjustment unit realizing power factor 1 and much reduction of higher harmonic wave

CO2 reduction : 135t/year
It calculates by operation for 300 hours/one month.
500KVA furnace for heat treating Three set's power-factors 0.4.

The CO2 reduction effect after improving to the power-factor 1.0
(with high-pressure power receiving [ 66KVA specially ])
XYZ
New design heater for semiconductor furnace
XYZ

Uniform within wafer temperature and quick ramping up / down speed heater
12 inches (phi300mm) or 8 inches (phi200mm) all equipment are possible to use.

Survey data
(Top, Center, Bottom zone temperature measured by 150mm phi TC wafer)
600℃
800℃
TOP ⊿0.5℃
TOP ⊿0.7℃
CNT ⊿0.1℃
CNT ⊿0.3℃
BTM ⊿0.4℃
BTM ⊿0.5℃
SDS Unit
Automatic control system in-situ monitoring unit

The diagnosis unit which prevents an accident by in-situ current monitoring


* except for the introduced products --
"vacuum-drying type storage warehouse", "levelness adjustment unit", etc.
I hold the product of 100 or more.
Please consult anything.