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Standard small high temperature high vacuum atmosphere furnace


Product feature
◎Short cycle evaluation or production will be available by high speed vacuuming and
   high speed temperature down, because reactor is assembled low adiabatic structure by
   molybdenum and graphite.
◎Very high purity and quality production is available by clean and low out gas annealing.
◎Easy top access is available to reactor inside.
◎Chamber structure has a water cooling jacket, a protective cover, etc. to keeping enough safety and
   protecting thermal damage


Standard small high temperature high vacuum atmosphere furnace 1800ST series specification
maximum temperature
1800℃(1750℃)
Ultimate vacuum
×10-5Pa (TMP)
×10-3Pa (DP)
Atmosphere gas
a vacuum, atmosphere
Atmosphere pressure
0.07kg/cm2
Dimension
phi50×70h
phi100×100h
phi150×150h