RF heating single crystal growth equipment by CZ method

characteristics

Temperature(H/OD/ID) Max. : 2000 degree C
Heating RF induction heating
Chamber Quartz type

Specifications

Mechanism

Seed pulling axis(H/OD/ID) Speed:low range 0.1-10mm/hr
high range 2-300mm/min
Up/Down stroke:600mm
Seed rotating axis Speed:0.3-60rpm
Work coil elevating axis Speed:low range 0.1-10mm/hr
high range 2-300mm/min
Up/Down stroke: 100mm
Load cell 20K specification on seed axis

RF generator

Output (H/OD/ID) 40kW
only work coil
Frequency Fixed frequency from 5 to 9.9khz
Power supply 3Φ200V±10%
50/60hz

Dimension

Main body Wide/1.45m
Depth/1.45m
Foot print/2.1㎡
Hight/3.19m
Controller Wide/0.85m
Depth/1.03m
Foot print/0.88㎡
Hight/1.792m
RF generator Wide/0.43m
Depth/0.81m
Foot print/0.35㎡
Hight/0.8m
Matching trans Wide/0.676m
Depth/1.09m
Foot print/0.74㎡
Hight/0.675m

Structure