CZ single crystal growth equipment with RF heating system.

Characteristics

Temperature Max : 2,000 ℃
Heating system RF induction heating
Chamber Quartz type

Specifications

Driving system

Pulling speed low range:  0.1-10mm/hr
high range: 2-300mm/min
(movable range: 600mm)
Rotation rate 0.3-60rpm
Work-coil speed low range:  0.1-10mm/hr
high range: 2-300mm/min
(movable range: 100mm)
Load cell 20kg (typical)

RF generator

Output 40kW (work-coil only)
Frequency Fixed from 5 to 9.9kHz
Power supply 3Φ200V±10%
50/60Hz

Typical outer size

Main chamber W 1,450  D 1,450   H 3,190
Controller W 850     D 1,030   H 1,792
RF generator W 430     D 810      H 800
Matching trans box W 676     D 1,090   H 675

Structure