Degas furnace (Reduction furnace)
This furnace is reduction (degas) processor in quartz tube using vertical resistance heater and reactor parts.
- Reactor has hydrogen detector and will be purged by Ar when H2 leak occurred.
- System is corresponding to abnormal heating and instantaneous power failure by over heat prevention function.
- Tool has paper less recorder (8 points) and available low pressure process.
- Temperature control
- Clean ambient processing is available at low contamination quartz tube atmosphere by bottom access loading system.
|Temperature range||500 ~ 1000℃|
|1 zone kanthal element|