Degas furnace (Reduction furnace)


This furnace is reduction (degas) processor in quartz tube using vertical resistance heater and reactor parts.
  • Reactor has hydrogen detector and will be purged by Ar when H2 leak occurred.
  • System is corresponding to abnormal heating and instantaneous power failure by over heat prevention function.
  • Tool has paper less recorder (8 points) and available low pressure process.
  • Temperature control
  • Clean ambient processing is available at low contamination quartz tube atmosphere by bottom access loading system.
Maximum temperature 1000℃
Temperature range 500 ~ 1000℃
1 zone kanthal element