Heat treatment of samples is performed under vacuum or inert gas atmosphere.
- This furnace is constructed of molybdenum and graphite parts, and any insulators like ceramic fibers are not used for it. Quick response of temperature and vacuum realizes a short-time process cycle.
- By using molybdenum and graphite parts, very high purity and quality production is available.
- The work can be sasily and safely set by this top access.
- Safe system protects from a thermal damage during the heating process.
e.g.) Water cooling jackets, protective covers.
|Ultimate vacuum||×10-5Pa (with a turbomolecular pump)
×10-3Pa (with a diffusion pump)
|Atmosphere gas||Vacuum and inert gas atmosphere|
|Pressure of atmosphere||0.07kg/cm2|