Sanko Co.,Ltd. is expert for graphite/ceramics parts, improvement of environment, E power and process efficiency, and new heater development.

Ceramic

Ceramic product

Thermal Insulator (Al2O3・ZrO2

  • Selectable from porous to dense materials.
  • Maximum size :W1000 × D1000 × H480
  • We also have ZrO2 bubbles.
Al2O3(Typical)
  material HA-K
Tube(constructed by three parts) φ300×φ280×145 [mm]

ZrO2(Typical)
material SG-#3
Tube(constructed by two parts) φ270×φ240×160 [mm]

Machined Ceramic

  • Manufacturing of cylindrical parts by a lathe.
  • Maximum size (a rough indication) : φ100 [mm] x 70 [mm] L
  • Al2O3 Purity : 92 ・ 96 ・ 99 ・ 99.5 [%]
  • SiO2 coat processing is available.
  • Please consult us about screw hole processing and helisert (helical coil wire screw thread insert).
Thermal Insulator (e.g. for CZ growth of oxide)
Alumina ceramic Al2O3  62~99.5%
Zirconia ceramic ZrO2 + HfO2  92~93%
Magnesia ceramic MgO  99%
Ceramics for semiconductor manufacturing
High purity alumina ceramic Al2O3  92~99.5%

Comparison of our thermal insulator

HZ-N SG-B SG-#3 F-SG
Density Low Low Middle High
Thermal conduction Low Low-Middle Middle High
Thermal expansion High Middle Low Middle
Thermal-insulation property & Durability Good thermal-insulation property Balanced Balanced Good durability Highest durability

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